Practical deployment of IoT (Internet of Things) requires low-power microelectronics as well as their ever-lasting power source. Recent trials use batteries and solar-cells but they cannot produce power at night or in a dark place. In our MEMS lab, we develop MEMS (microelectromechanical systems) type vibrational energy harvester that produces electrical power from the mechanical vibrations in natural environment and man-made machines.

Combining an electrostatically driven MEMS Fabry-Perot interferometer and a VCSEL (vertical-cavity surface-emitting laser), we have developed a wavelength-tunable laser diode that is used in an OCT (optical coherence tomography) system for ophthalmologic inspections including axial-length measurement as well as corneal and retinal examinations. This work has been performed in collaboration with SANTEC Corp. since 2002.

Electrophysiological measurement of cultured cells (cardiac cells and neuron cells) has been made possible on a thin-film transistor array that is also used to drive liquid-crystal displays. As a next step, we plan to implant the TFT device for in vivo multi-organ interlink analysis. This work is performed with Dr. Agnès Tixier-Mita of Institute of Industrial Science.